Improvement of an Active Temperature Measurement Cantilever of a Scanning Thermal Microscope
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چکیده
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The atomic force microscope (AFM) has become an essential tool for the measurement of surface characteristics of diverse materials on a microand nanoscale level [1]. The resolution of measurements for the AFM cantilever is related to its vibration sensitivity. Many researchers have much interest in studying the resonant frequency and sensitivity analysis of AFM cantilevers [2 4]. Cracks may be ...
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The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2004
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.124.453